Reliability of MEMS : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya.
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| Superior document: | Advanced micro & nanosystems |
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| Year of Publication: | 2013 |
| Language: | English |
| Series: | Advanced micro & nanosystems.
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| Online Access: | |
| Physical Description: | xx, 303 p. :; ill. |
| Notes: | First edition 2007. |
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