Micro electronic and mechanical systems / / Kenichi Takahata, editor.
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
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| Place / Publishing House: | [Place of publication not identified] : : InTech,, [2009] ©2009 |
| Year of Publication: | 2009 |
| Language: | English |
| Physical Description: | 1 online resource (526 pages) :; illustrations |
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Electronic
| DOAB Directory of Open Access Books | Available |