Micro electronic and mechanical systems / / Kenichi Takahata, editor.
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
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| Place / Publishing House: | [Place of publication not identified] : : InTech,, [2009] ©2009 |
| Year of Publication: | 2009 |
| Language: | English |
| Physical Description: | 1 online resource (526 pages) :; illustrations |
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(CKB)3230000000076414 (NjHacI)993230000000076414 (oapen)https://directory.doabooks.org/handle/20.500.12854/64724 (EXLCZ)993230000000076414 |
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Takahata, Kenichi edt Micro electronic and mechanical systems / Kenichi Takahata, editor. IntechOpen 2009 [Place of publication not identified] : InTech, [2009] ©2009 1 online resource (526 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Description based on: online resource; title from PDF information screen (InTech, viewed October 13, 2022). Includes bibliographical references. This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. English Microelectromechanical systems. Electronics engineering 953-307-027-7 Takahata, Kenichi, editor. |
| language |
English |
| format |
eBook |
| author2 |
Takahata, Kenichi, |
| author_facet |
Takahata, Kenichi, |
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k t kt k t kt |
| author2_role |
TeilnehmendeR |
| title |
Micro electronic and mechanical systems / |
| spellingShingle |
Micro electronic and mechanical systems / |
| title_full |
Micro electronic and mechanical systems / Kenichi Takahata, editor. |
| title_fullStr |
Micro electronic and mechanical systems / Kenichi Takahata, editor. |
| title_full_unstemmed |
Micro electronic and mechanical systems / Kenichi Takahata, editor. |
| title_auth |
Micro electronic and mechanical systems / |
| title_new |
Micro electronic and mechanical systems / |
| title_sort |
micro electronic and mechanical systems / |
| publisher |
IntechOpen InTech, |
| publishDate |
2009 |
| physical |
1 online resource (526 pages) : illustrations |
| isbn |
953-51-5847-3 953-307-027-7 |
| callnumber-first |
T - Technology |
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TK - Electrical and Nuclear Engineering |
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TK7875 |
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TK 47875 M537 42009 |
| illustrated |
Illustrated |
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600 - Technology |
| dewey-tens |
620 - Engineering |
| dewey-ones |
621 - Applied physics |
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621.381 |
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3621.381 |
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621.381 |
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621.381 |
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AT takahatakenichi microelectronicandmechanicalsystems |
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n |
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(CKB)3230000000076414 (NjHacI)993230000000076414 (oapen)https://directory.doabooks.org/handle/20.500.12854/64724 (EXLCZ)993230000000076414 |
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