Micro electro mechanical systems (MEMS) : technology, fabrication processes and applications / / Britt Ekwall and Mikkel Cronquist, editors.
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| Superior document: | Nanotechnology science and technology |
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| Year of Publication: | 2010 |
| Language: | English |
| Series: | Nanotechnology science and technology series.
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| Online Access: | |
| Physical Description: | xii, 391 p. :; ill. (some col.). |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9781608764747 (hardcover : alk. paper) 9781613246986 (electronic bk.) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Britt Ekwall and Mikkel Cronquist, editors. |