Micro electro mechanical systems (MEMS) : technology, fabrication processes and applications / / Britt Ekwall and Mikkel Cronquist, editors.
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| Superior document: | Nanotechnology science and technology |
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| Year of Publication: | 2010 |
| Language: | English |
| Series: | Nanotechnology science and technology series.
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| Online Access: | |
| Physical Description: | xii, 391 p. :; ill. (some col.). |
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