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Micro electro mechanical systems (MEMS) : technology, fabrication processes and applications / / Britt Ekwall and Mikkel Cronquist, editors.

Participants: ProQuest (Firm) [ ]; Ekwall, Britt. [ TeilnehmendeR ]; Cronquist, Mikkel. [ TeilnehmendeR ]; ProQuest (Firm) [ TeilnehmendeR ]
Published: c2010.
Superior document: Nanotechnology science and technology

Other Authors: “...Cronquist, Mikkel....”

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