Micro electro mechanical systems (MEMS) : technology, fabrication processes and applications / / Britt Ekwall and Mikkel Cronquist, editors.
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Superior document: | Nanotechnology science and technology |
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TeilnehmendeR: | |
Year of Publication: | 2010 |
Language: | English |
Series: | Nanotechnology science and technology series.
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Physical Description: | xii, 391 p. :; ill. (some col.). |
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5003019660 |
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(MiAaPQ)5003019660 (Au-PeEL)EBL3019660 (CaPaEBR)ebr10671225 (OCoLC)923661468 |
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Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors. Hauppauge, N.Y. : Nova Science Publishers, c2010. xii, 391 p. : ill. (some col.). Nanotechnology science and technology Includes bibliographical references and index. Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. Microelectromechanical systems. Electronic books. Ekwall, Britt. Cronquist, Mikkel. ProQuest (Firm) Nanotechnology science and technology series. https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3019660 Click to View |
language |
English |
format |
Electronic eBook |
author2 |
Ekwall, Britt. Cronquist, Mikkel. ProQuest (Firm) |
author_facet |
Ekwall, Britt. Cronquist, Mikkel. ProQuest (Firm) ProQuest (Firm) |
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b e be m c mc |
author2_role |
TeilnehmendeR TeilnehmendeR TeilnehmendeR |
author_corporate |
ProQuest (Firm) |
author_sort |
Ekwall, Britt. |
title |
Micro electro mechanical systems (MEMS) technology, fabrication processes and applications / |
spellingShingle |
Micro electro mechanical systems (MEMS) technology, fabrication processes and applications / Nanotechnology science and technology |
title_sub |
technology, fabrication processes and applications / |
title_full |
Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors. |
title_fullStr |
Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors. |
title_full_unstemmed |
Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors. |
title_auth |
Micro electro mechanical systems (MEMS) technology, fabrication processes and applications / |
title_new |
Micro electro mechanical systems (MEMS) |
title_sort |
micro electro mechanical systems (mems) technology, fabrication processes and applications / |
series |
Nanotechnology science and technology |
series2 |
Nanotechnology science and technology |
publisher |
Nova Science Publishers, |
publishDate |
2010 |
physical |
xii, 391 p. : ill. (some col.). |
isbn |
9781613246986 (electronic bk.) |
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T - Technology |
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TK - Electrical and Nuclear Engineering |
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TK7875 |
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TK 47875 M5284 42010 |
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Electronic books. |
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Electronic books. |
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https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3019660 |
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Illustrated |
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600 - Technology |
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620 - Engineering |
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621 - Applied physics |
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621 |
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3621 |
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621 |
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621 |
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923661468 |
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(MiAaPQ)5003019660 (Au-PeEL)EBL3019660 (CaPaEBR)ebr10671225 (OCoLC)923661468 |
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Nanotechnology science and technology |
is_hierarchy_title |
Micro electro mechanical systems (MEMS) technology, fabrication processes and applications / |
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Nanotechnology science and technology |
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