MEMS mechanical sensors / Stephen Beeby ... [et al.
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| Superior document: | Artech House microelectromechanical systems (MEMS) series |
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| TeilnehmendeR: | |
| Year of Publication: | 2004 |
| Language: | English |
| Series: | Microelectromechanical systems series.
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| Online Access: | |
| Physical Description: | x, 269 p. :; ill. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 1580538738 1580535364 (alk. paper) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Stephen Beeby ... [et al. |