MEMS mechanical sensors / Stephen Beeby ... [et al.
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Superior document: | Artech House microelectromechanical systems (MEMS) series |
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TeilnehmendeR: | |
Year of Publication: | 2004 |
Language: | English |
Series: | Microelectromechanical systems series.
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Online Access: | |
Physical Description: | x, 269 p. :; ill. |
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Bibliography: | Includes bibliographical references and index. |
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ISBN: | 1580538738 1580535364 (alk. paper) |
Hierarchical level: | Monograph |
Statement of Responsibility: | Stephen Beeby ... [et al. |