MEMS mechanical sensors

MEMS mechanical sensors / Stephen Beeby ... [et al.

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Superior document:Artech House microelectromechanical systems (MEMS) series
:
ProQuest (Firm)
TeilnehmendeR:
Beeby, Stephen.
ProQuest (Firm)
Year of Publication:2004
Language:English
Series:Microelectromechanical systems series.
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Physical Description:x, 269 p. :; ill.
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spelling MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al.
Boston : Artech House, c2004.
x, 269 p. : ill.
Artech House microelectromechanical systems (MEMS) series
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectromechanical systems.
Detectors.
Electronic books.
Beeby, Stephen.
ProQuest (Firm)
Microelectromechanical systems series.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=231651 Click to View
language English
format Electronic
eBook
author2 Beeby, Stephen.
ProQuest (Firm)
author_facet Beeby, Stephen.
ProQuest (Firm)
ProQuest (Firm)
author2_variant s b sb
author2_role TeilnehmendeR
TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Beeby, Stephen.
title MEMS mechanical sensors
spellingShingle MEMS mechanical sensors
Artech House microelectromechanical systems (MEMS) series
title_full MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al.
title_fullStr MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al.
title_full_unstemmed MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al.
title_auth MEMS mechanical sensors
title_new MEMS mechanical sensors
title_sort mems mechanical sensors
series Artech House microelectromechanical systems (MEMS) series
series2 Artech House microelectromechanical systems (MEMS) series
publisher Artech House,
publishDate 2004
physical x, 269 p. : ill.
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7875
callnumber-sort TK 47875 M4537 42004
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=231651
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 680 - Manufacture for specific uses
dewey-ones 681 - Precision instruments & other devices
dewey-full 681/.2
dewey-sort 3681 12
dewey-raw 681/.2
dewey-search 681/.2
oclc_num 55895606
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is_hierarchy_title MEMS mechanical sensors
container_title Artech House microelectromechanical systems (MEMS) series
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