Hermeticity testing of MEMS and microelectronic packages / / Suzanne Costello, Marc P.Y. Desmulliez.
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| Superior document: | Integrated microsystems series |
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| Place / Publishing House: | Boston : : Artech House,, [2013] 2013 |
| Year of Publication: | 2013 |
| Language: | English |
| Series: | Artech House integrated microsystems series.
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| Online Access: | |
| Physical Description: | 1 online resource (197 pages) :; illustrations. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9781608075270 (cloth) 1608075273 (cloth) 9781608075287 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Suzanne Costello, Marc P.Y. Desmulliez. |