Hermeticity testing of MEMS and microelectronic packages / / Suzanne Costello, Marc P.Y. Desmulliez.

• Superior document: Integrated microsystems series
• VerfasserIn: Costello, Suzanne,; Desmulliez, Marc P. Y., 1963-
• TeilnehmendeR: Desmulliez, Marc P. Y., 1963-
• Place / Publishing House: Boston : : Artech House,, [2013]; 2013
• Year of Publication: 2013
• Language: English
• Series: Artech House integrated microsystems series.
• Physical Description: 1 online resource (197 pages) :; illustrations.

Table of Contents

• Machine generated contents note: References
• pt. 1 Introduction to Hermetic Packages and Leak Types
• 1.The Evolution of Packages, Their Sealing Methods, and Modes of Fabrication
• 1.1.Introduction
• 1.2.The Evolution of Microelectronics and MEMS Packages
• 1.3.MEMS Sealing Techniques and Mode Package Fabrication
• 1.3.1.Materials
• 1.3.2.Sealing Techniques
• 1.4.Summary of MEMS Packaging Materials and Techniques
• References
• 2.Assembly, Packaging, and Environmentally Induced Failures in MEMS
• 2.1.Introduction
• 2.2.Particle Contamination
• 2.3.Thermomechanical Constraints
• 2.3.1.Thermomechanical Constraints in Die Attach
• 2.3.2.Thermomechanical Constraints in Package-Level Encapsulation
• 2.3.3.Thermomechanical Constraints in Wafer-Level Encapsulation
• 2.3.4.Thermomechanical Constraints in Flip-Chip Bonding
• 2.4.Moisture and Gas Absorption
• 2.4.1.Moisture Absorption
• 2.4.2.Barrier Coatings: A Protection Against Moisture Absorption
• 2.4.3.Outgassing
• 2.5.Conclusions: Reliability Demonstration and Accelerated Testing
• References
• 3.Packaging Requirements for Hermeticity
• 3.1.The Need for Hermeticity in MEMS and Microelectronics Packaging
• 3.2.Balancing Maximum Permissive Leak Rate and Packaging Costs: The Quasi-Hermetic Package
• References
• 4.The Different Types of Leaks in MEMS and Microelectronics Packaging
• 4.1.Introduction
• 4.2.Leak Channels or Capillary Leaks
• 4.3.Permeation
• 4.4.Outgassing
• 4.5.Conclusion
• References
• pt. 2 Traditional Hermeticity Test Techniques and Standards
• 5.Ex Situ Hermeticity Test Methods
• 5.1.Introduction
• 5.2.Fine Leak Tests
• 5.2.1.Helium Fine Leak Test
• 5.2.2.Radioisotope Leak Detection Method
• 5.3.Gross Leak Tests
• 5.3.1.Fluorocarbon Liquid and Vapor Gross Leak Detection
• 5.3.2.Gross Bubble Test
• 5.3.3.Weight Gain
• 5.3.4.Dye Penetrant Gross Leak Test
• 5.4.Combinational Tests
• 5.4.1.Optical Fine/Gross Leak Detection Method
• 5.4.2.Cumulative Helium Leak Detection (CHLD) Method
• References
• 6.The History of Hermeticity Standards MIL-STD-883 T.M. 1014 and MIL-STD-750 T.M. 1071
• 6.1.Introduction: The First Hermeticity Tests
• 6.2.The Introduction of the Military Standards
• 6.3.The First Problems with Traditional Hermeticity Tests and Standards
• 6.4.Military Standard Revisions
• 6.5.Summary
• References
• pt. 3 Limitations of Existing Hermeticity Test Methods in Low Volume Packages
• 7.Permeation
• 7.1.Introduction
• 7.2.Mathematics of Permeation
• 7.3.Limitations of the Packaging Material
• 7.4.Conclusions
• References
• 8.Outgassing and Residual Gas Analysis (RGA)
• 8.1.Outgassing
• 8.2.Residual Gas Analysis
• References
• 9.Low-Cavity Volume Capillary Leak Limitations
• 9.1.Limitations of the Helium Fine Leak Test Method
• 9.1.1.Volume Limitations
• 9.1.2.Minimum Detectable Leak Rate
• References
• pt. 4 Novel Methods of Leak Detection
• 10.Q-Factor Monitoring of Resonant Microstructures as a Hermeticity Measurement Method
• 10.1.Introduction
• 10.2.Lumped Element Modeling of a Microresonator
• 10.3.Definitions and Measurement Methods of the Quality Factor Q
• 10.3.1.Definition in Terms of Stored Energy
• 10.3.2.Definition in Terms of Bandwidth
• 10.3.3.Determination of the Q-Factor by Amplitude-Frequency Measurement
• 10.3.4.Determination of the Q-Factor by Phase Measurement
• 10.4.Relation Between Pressure and Q-Factor
• References
• 11.In Situ Test Methods in Development
• 11.1.Introduction
• 11.2.Copper Test Structures
• 11.3.Micro-Pirani Gauge
• References
• 12.Ex Situ Hermeticity Test Methods in Development
• 12.1.Introduction
• 12.2.FTIR Spectroscopy
• 12.2.1.Application to Hermeticity
• 12.2.2.Theoretical Limitations
• 12.2.3.Practical Considerations
• 12.2.4.Summary
• 12.3.Raman Spectroscopy
• 12.3.1.Application to the Hermeticity Test
• 12.3.2.Theoretical Limitations
• 12.3.3.Practical Considerations
• 12.3.4.Summary
• References
• pt. 5 Conclusions and Vision
• 13.Summary of Hermeticity Test Methods
• 14.The Way Forward
• 14.1.Introduction
• 14.2.Improvement on Existing Techniques
• 14.3.New Hermetic Materials and Hermeticity Test Methods
• 14.4.Conclusions
• References.