Resonant MEMS : : fundamentals, implementation and application / / edited by Oliver Brand [and three others].
Saved in:
Superior document: | Advanced Micro & Nanosystems |
---|---|
TeilnehmendeR: | |
Place / Publishing House: | Weinheim, Baden-Wurttemberg, Germany : : Wiley-VCH,, 2015. 2015 |
Year of Publication: | 2015 |
Language: | English |
Series: | Advanced micro & nanosystems.
|
Online Access: | |
Physical Description: | 1 online resource (512 pages) :; illustrations (some color), graphs. |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Bibliography: | Includes bibliographical references at the end of each chapters and index. |
---|---|
ISBN: | 9783527335459 9783527676361 |
Hierarchical level: | Monograph |
Statement of Responsibility: | edited by Oliver Brand [and three others]. |