Resonant MEMS : : fundamentals, implementation and application / / edited by Oliver Brand [and three others].
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| Superior document: | Advanced Micro & Nanosystems |
|---|---|
| TeilnehmendeR: | |
| Place / Publishing House: | Weinheim, Baden-Wurttemberg, Germany : : Wiley-VCH,, 2015. 2015 |
| Year of Publication: | 2015 |
| Language: | English |
| Series: | Advanced micro & nanosystems.
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| Online Access: | |
| Physical Description: | 1 online resource (512 pages) :; illustrations (some color), graphs. |
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| 020 | |z 9783527335459 | ||
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| 082 | 0 | |a 621.381 |2 23 | |
| 245 | 0 | 0 | |a Resonant MEMS : |b fundamentals, implementation and application / |c edited by Oliver Brand [and three others]. |
| 264 | 1 | |a Weinheim, Baden-Wurttemberg, Germany : |b Wiley-VCH, |c 2015. | |
| 264 | 4 | |c 2015 | |
| 300 | |a 1 online resource (512 pages) : |b illustrations (some color), graphs. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 490 | 1 | |a Advanced Micro & Nanosystems | |
| 504 | |a Includes bibliographical references at the end of each chapters and index. | ||
| 588 | |a Description based on online resource; title from PDF title page (ebrary, viewed May 21, 2015). | ||
| 590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems |x Design and construction. | |
| 650 | 0 | |a Microfabrication. | |
| 650 | 0 | |a Resonance. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Brand, Oliver, |e editor. | |
| 776 | 0 | 8 | |i Print version: |t Resonant MEMS : fundamentals, implementation and application. |d Weinheim, Baden-Wurttemberg, Germany : Wiley-VCH, c2015 |h xxv, 483 pages |k Advanced micro & nanosystems. |z 9783527335459 |
| 797 | 2 | |a ProQuest (Firm) | |
| 830 | 0 | |a Advanced micro & nanosystems. | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=2034318 |z Click to View |