Resonant MEMS : : fundamentals, implementation and application /

Resonant MEMS : : fundamentals, implementation and application / / edited by Oliver Brand [and three others].

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Bibliographic Details
Superior document:Advanced Micro & Nanosystems
TeilnehmendeR:
Brand, Oliver,
Place / Publishing House:Weinheim, Baden-Wurttemberg, Germany : : Wiley-VCH,, 2015.
2015
Year of Publication:2015
Language:English
Series:Advanced micro & nanosystems.
Online Access:
Physical Description:1 online resource (512 pages) :; illustrations (some color), graphs.
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collection bib_alma
record_format marc
spelling Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand [and three others].
Weinheim, Baden-Wurttemberg, Germany : Wiley-VCH, 2015.
2015
1 online resource (512 pages) : illustrations (some color), graphs.
text rdacontent
computer rdamedia
online resource rdacarrier
Advanced Micro & Nanosystems
Includes bibliographical references at the end of each chapters and index.
Description based on online resource; title from PDF title page (ebrary, viewed May 21, 2015).
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectromechanical systems Design and construction.
Microfabrication.
Resonance.
Electronic books.
Brand, Oliver, editor.
Print version: Resonant MEMS : fundamentals, implementation and application. Weinheim, Baden-Wurttemberg, Germany : Wiley-VCH, c2015 xxv, 483 pages Advanced micro & nanosystems. 9783527335459
ProQuest (Firm)
Advanced micro & nanosystems.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=2034318 Click to View
language English
format eBook
author2 Brand, Oliver,
author_facet Brand, Oliver,
author2_variant o b ob
author2_role TeilnehmendeR
title Resonant MEMS : fundamentals, implementation and application /
spellingShingle Resonant MEMS : fundamentals, implementation and application /
Advanced Micro & Nanosystems
title_sub fundamentals, implementation and application /
title_full Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand [and three others].
title_fullStr Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand [and three others].
title_full_unstemmed Resonant MEMS : fundamentals, implementation and application / edited by Oliver Brand [and three others].
title_auth Resonant MEMS : fundamentals, implementation and application /
title_new Resonant MEMS :
title_sort resonant mems : fundamentals, implementation and application /
series Advanced Micro & Nanosystems
series2 Advanced Micro & Nanosystems
publisher Wiley-VCH,
publishDate 2015
physical 1 online resource (512 pages) : illustrations (some color), graphs.
isbn 9783527676361
9783527335459
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7875
callnumber-sort TK 47875 R476 42015
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=2034318
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.381
dewey-sort 3621.381
dewey-raw 621.381
dewey-search 621.381
oclc_num 908512576
work_keys_str_mv AT brandoliver resonantmemsfundamentalsimplementationandapplication
status_str n
ids_txt_mv (MiAaPQ)5002034318
(Au-PeEL)EBL2034318
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(CaONFJC)MIL778981
(OCoLC)908512576
hierarchy_parent_title Advanced Micro & Nanosystems
is_hierarchy_title Resonant MEMS : fundamentals, implementation and application /
container_title Advanced Micro & Nanosystems
author2_original_writing_str_mv noLinkedField
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