Handbook of silicon based MEMS materials and technologies / / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
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| Superior document: | Micro & Nano Technologies Series |
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| TeilnehmendeR: | |
| Place / Publishing House: | Amsterdam, [Netherlands] : : William Andrew,, 2015. 2015 |
| Year of Publication: | 2015 |
| Edition: | Second edition. |
| Language: | English |
| Series: | Micro & nano technologies.
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| Online Access: | |
| Physical Description: | 1 online resource (827 pages) :; illustrations (some color), photographs. |
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| Bibliography: | Includes bibliographical references at the end of each chapters and index. |
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| ISBN: | 9780323299657 9780323312233 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others]. |