Handbook of silicon based MEMS materials and technologies /

Handbook of silicon based MEMS materials and technologies / / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].

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Bibliographic Details
Superior document:Micro & Nano Technologies Series
TeilnehmendeR:
Tilli, Markku,
Aalto, Timo,
Place / Publishing House:Amsterdam, [Netherlands] : : William Andrew,, 2015.
2015
Year of Publication:2015
Edition:Second edition.
Language:English
Series:Micro & nano technologies.
Online Access:
Physical Description:1 online resource (827 pages) :; illustrations (some color), photographs.
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ctrlnum (MiAaPQ)5004003527
(Au-PeEL)EBL4003527
(CaPaEBR)ebr11124045
(CaONFJC)MIL254114
(OCoLC)932328742
collection bib_alma
record_format marc
spelling Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
Second edition.
Amsterdam, [Netherlands] : William Andrew, 2015.
2015
1 online resource (827 pages) : illustrations (some color), photographs.
text rdacontent
computer rdamedia
online resource rdacarrier
Micro & Nano Technologies Series
Includes bibliographical references at the end of each chapters and index.
Description based on print version record.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectromechanical systems.
Microelectromechanical systems Materials.
Silicon Electric properties.
Electronic books.
Tilli, Markku, editor.
Aalto, Timo, contributor.
Print version: Handbook of silicon based MEMS materials and technologies. Second edition. Amsterdam, [Netherlands] : William Andrew, c2015 xxxvii, 787 pages Micro & nano technologies. 9780323299657 2015937707
ProQuest (Firm)
Micro & nano technologies.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=4003527 Click to View
language English
format eBook
author2 Tilli, Markku,
Aalto, Timo,
author_facet Tilli, Markku,
Aalto, Timo,
author2_variant m t mt
t a ta
author2_role TeilnehmendeR
TeilnehmendeR
title Handbook of silicon based MEMS materials and technologies /
spellingShingle Handbook of silicon based MEMS materials and technologies /
Micro & Nano Technologies Series
title_full Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
title_fullStr Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
title_full_unstemmed Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
title_auth Handbook of silicon based MEMS materials and technologies /
title_new Handbook of silicon based MEMS materials and technologies /
title_sort handbook of silicon based mems materials and technologies /
series Micro & Nano Technologies Series
series2 Micro & Nano Technologies Series
publisher William Andrew,
publishDate 2015
physical 1 online resource (827 pages) : illustrations (some color), photographs.
edition Second edition.
isbn 9780323312233
9780323299657
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7875
callnumber-sort TK 47875 H363 42015
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=4003527
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.381
dewey-sort 3621.381
dewey-raw 621.381
dewey-search 621.381
oclc_num 932328742
work_keys_str_mv AT tillimarkku handbookofsiliconbasedmemsmaterialsandtechnologies
AT aaltotimo handbookofsiliconbasedmemsmaterialsandtechnologies
status_str n
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(CaPaEBR)ebr11124045
(CaONFJC)MIL254114
(OCoLC)932328742
hierarchy_parent_title Micro & Nano Technologies Series
is_hierarchy_title Handbook of silicon based MEMS materials and technologies /
container_title Micro & Nano Technologies Series
author2_original_writing_str_mv noLinkedField
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