Digital holography for MEMS and microsystem metrology / edited by Anand Asundi.
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Superior document: | The Wiley microsystem and nanotechnology series |
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Year of Publication: | 2011 |
Language: | English |
Series: | Wiley microsystem and nanotechnology series.
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Online Access: | |
Physical Description: | xxii, 205 p. :; ill., port. |
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Bibliography: | Includes bibliographical references and index. |
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ISBN: | 9780470978696 (cloth) 9781119997306 (ePDF) 9781119997290 (oBook) 9781119972785 (ePub) 9781119972792 (Mobi) 9781119997306 (ebook) |
Hierarchical level: | Monograph |
Statement of Responsibility: | edited by Anand Asundi. |