Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology / edited by Anand Asundi.

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Superior document:The Wiley microsystem and nanotechnology series
:
ProQuest (Firm)
TeilnehmendeR:
Asundi, Anand.
ProQuest (Firm)
Year of Publication:2011
Language:English
Series:Wiley microsystem and nanotechnology series.
Online Access:
Physical Description:xxii, 205 p. :; ill., port.
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record_format marc
spelling Digital holography for MEMS and microsystem metrology [electronic resource] / edited by Anand Asundi.
Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011.
xxii, 205 p. : ill., port.
The Wiley microsystem and nanotechnology series
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectromechanical systems Measurement.
Microelectronics Measurement.
Holographic testing.
Image processing Digital techniques.
Electronic books.
Asundi, Anand.
ProQuest (Firm)
Wiley microsystem and nanotechnology series.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=697681 Click to View
language English
format Electronic
eBook
author2 Asundi, Anand.
ProQuest (Firm)
author_facet Asundi, Anand.
ProQuest (Firm)
ProQuest (Firm)
author2_variant a a aa
author2_role TeilnehmendeR
TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Asundi, Anand.
title Digital holography for MEMS and microsystem metrology
spellingShingle Digital holography for MEMS and microsystem metrology
The Wiley microsystem and nanotechnology series
title_full Digital holography for MEMS and microsystem metrology [electronic resource] / edited by Anand Asundi.
title_fullStr Digital holography for MEMS and microsystem metrology [electronic resource] / edited by Anand Asundi.
title_full_unstemmed Digital holography for MEMS and microsystem metrology [electronic resource] / edited by Anand Asundi.
title_auth Digital holography for MEMS and microsystem metrology
title_new Digital holography for MEMS and microsystem metrology
title_sort digital holography for mems and microsystem metrology
series The Wiley microsystem and nanotechnology series
series2 The Wiley microsystem and nanotechnology series
publisher Wiley,
publishDate 2011
physical xxii, 205 p. : ill., port.
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7875
callnumber-sort TK 47875 D54 42011
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=697681
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.381
dewey-sort 3621.381
dewey-raw 621.381
dewey-search 621.381
oclc_num 746324291
work_keys_str_mv AT asundianand digitalholographyformemsandmicrosystemmetrology
AT proquestfirm digitalholographyformemsandmicrosystemmetrology
status_str n
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hierarchy_parent_title The Wiley microsystem and nanotechnology series
is_hierarchy_title Digital holography for MEMS and microsystem metrology
container_title The Wiley microsystem and nanotechnology series
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