Digital holography for MEMS and microsystem metrology / edited by Anand Asundi.
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| Superior document: | The Wiley microsystem and nanotechnology series |
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| Year of Publication: | 2011 |
| Language: | English |
| Series: | Wiley microsystem and nanotechnology series.
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| Physical Description: | xxii, 205 p. :; ill., port. |
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