Microelectromechanical Systems and Devices / / edited by Nazmul Islam.
The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a nee...
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| Place / Publishing House: | Rijeka, Croatia : : IntechOpen,, 2012. |
| Year of Publication: | 2012 |
| Language: | English |
| Physical Description: | 1 online resource (494 pages) :; illustrations some color |
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Electronic
| DOAB Directory of Open Access Books | Available |