Digital holography for MEMS and microsystem metrology

Digital holography for MEMS and microsystem metrology / edited by Anand Asundi.

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Bibliographic Details
Superior document:The Wiley microsystem and nanotechnology series
:
ProQuest (Firm)
TeilnehmendeR:
Asundi, Anand.
ProQuest (Firm)
Year of Publication:2011
Language:English
Series:Wiley microsystem and nanotechnology series.
Online Access:
Physical Description:xxii, 205 p. :; ill., port.
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082 0 4 |a 621.381  |2 22 
245 0 0 |a Digital holography for MEMS and microsystem metrology  |h [electronic resource] /  |c edited by Anand Asundi. 
260 |a Chichester, West Sussex, U.K. ;  |a Hoboken, N.J. :  |b Wiley,  |c 2011. 
300 |a xxii, 205 p. :  |b ill., port. 
490 1 |a The Wiley microsystem and nanotechnology series 
504 |a Includes bibliographical references and index. 
533 |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
650 0 |a Microelectromechanical systems  |x Measurement. 
650 0 |a Microelectronics  |x Measurement. 
650 0 |a Holographic testing. 
650 0 |a Image processing  |x Digital techniques. 
655 4 |a Electronic books. 
700 1 |a Asundi, Anand. 
710 2 |a ProQuest (Firm) 
830 0 |a Wiley microsystem and nanotechnology series. 
856 4 0 |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=697681  |z Click to View 

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