Material science and MEMS production : : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / / edited by Changhui Liu.
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| Superior document: | Advanced Materials Research, Volume 901 |
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| TeilnehmendeR: | |
| Place / Publishing House: | Zurich, Switzerland : : TTP,, 2014. 2014 |
| Year of Publication: | 2014 |
| Language: | English |
| Series: | Advanced materials research ;
Volume 901. |
| Online Access: | |
| Physical Description: | 1 online resource (117 pages) :; illustrations (some color), graphs, photographs. |
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| Bibliography: | Includes bibliographical references at the end of each chapters and indexes. |
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| ISBN: | 9783038350477 9783038264286 |
| ISSN: | 1662-8985 ; |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Changhui Liu. |