Material science and MEMS production : : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / / edited by Changhui Liu.
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Superior document: | Advanced Materials Research, Volume 901 |
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TeilnehmendeR: | |
Place / Publishing House: | Zurich, Switzerland : : TTP,, 2014. 2014 |
Year of Publication: | 2014 |
Language: | English |
Series: | Advanced materials research ;
Volume 901. |
Online Access: | |
Physical Description: | 1 online resource (117 pages) :; illustrations (some color), graphs, photographs. |
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