Development of CMOS-MEMS/NEMS Devices
Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and...
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| Year of Publication: | 2019 |
| Language: | English |
| Physical Description: | 1 electronic resource (165 p.) |
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Electronic
| DOAB Directory of Open Access Books | Available |