Reliability of MEMS : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya.
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Superior document: | Advanced micro & nanosystems |
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Year of Publication: | 2013 |
Language: | English |
Series: | Advanced micro & nanosystems.
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Online Access: | |
Physical Description: | xx, 303 p. :; ill. |
Notes: | First edition 2007. |
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