Reliability of MEMS : testing of materials and devices /

Reliability of MEMS : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya.

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Superior document:Advanced micro & nanosystems
:
ProQuest (Firm)
TeilnehmendeR:
Tabata, Osamu.
Tsuchiya, Toshiyuki.
ProQuest (Firm)
Year of Publication:2013
Language:English
Series:Advanced micro & nanosystems.
Online Access:
Physical Description:xx, 303 p. :; ill.
Notes:First edition 2007.
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record_format marc
spelling Reliability of MEMS [electronic resource] : testing of materials and devices / edited by Osamu Tabata, Toshiyuki Tsuchiya.
Weinheim : Wiley-VCH, 2013.
xx, 303 p. : ill.
Advanced micro & nanosystems
First edition 2007.
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectromechanical systems Reliability.
Electronic books.
Tabata, Osamu.
Tsuchiya, Toshiyuki.
ProQuest (Firm)
Advanced micro & nanosystems.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=481344 Click to View
language English
format Electronic
eBook
author2 Tabata, Osamu.
Tsuchiya, Toshiyuki.
ProQuest (Firm)
author_facet Tabata, Osamu.
Tsuchiya, Toshiyuki.
ProQuest (Firm)
ProQuest (Firm)
author2_variant o t ot
t t tt
author2_role TeilnehmendeR
TeilnehmendeR
TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Tabata, Osamu.
title Reliability of MEMS testing of materials and devices /
spellingShingle Reliability of MEMS testing of materials and devices /
Advanced micro & nanosystems
title_sub testing of materials and devices /
title_full Reliability of MEMS [electronic resource] : testing of materials and devices / edited by Osamu Tabata, Toshiyuki Tsuchiya.
title_fullStr Reliability of MEMS [electronic resource] : testing of materials and devices / edited by Osamu Tabata, Toshiyuki Tsuchiya.
title_full_unstemmed Reliability of MEMS [electronic resource] : testing of materials and devices / edited by Osamu Tabata, Toshiyuki Tsuchiya.
title_auth Reliability of MEMS testing of materials and devices /
title_new Reliability of MEMS
title_sort reliability of mems testing of materials and devices /
series Advanced micro & nanosystems
series2 Advanced micro & nanosystems
publisher Wiley-VCH,
publishDate 2013
physical xx, 303 p. : ill.
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7875
callnumber-sort TK 47875 R45 42013
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=481344
illustrated Illustrated
dewey-hundreds 500 - Science
dewey-tens 530 - Physics
dewey-ones 539 - Modern physics
dewey-full 539.60113
dewey-sort 3539.60113
dewey-raw 539.60113
dewey-search 539.60113
oclc_num 264717029
work_keys_str_mv AT tabataosamu reliabilityofmemstestingofmaterialsanddevices
AT tsuchiyatoshiyuki reliabilityofmemstestingofmaterialsanddevices
AT proquestfirm reliabilityofmemstestingofmaterialsanddevices
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hierarchy_parent_title Advanced micro & nanosystems
is_hierarchy_title Reliability of MEMS testing of materials and devices /
container_title Advanced micro & nanosystems
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