Reliability of MEMS : testing of materials and devices / / edited by Osamu Tabata, Toshiyuki Tsuchiya.
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| Superior document: | Advanced micro & nanosystems |
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| TeilnehmendeR: | |
| Year of Publication: | 2013 |
| Language: | English |
| Series: | Advanced micro & nanosystems.
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| Online Access: | |
| Physical Description: | xx, 303 p. :; ill. |
| Notes: | First edition 2007. |
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| 050 | 4 | |a TK7875 |b .R45 2013 | |
| 082 | 0 | 4 | |a 539.60113 |2 23 |
| 245 | 0 | 0 | |a Reliability of MEMS |h [electronic resource] : |b testing of materials and devices / |c edited by Osamu Tabata, Toshiyuki Tsuchiya. |
| 260 | |a Weinheim : |b Wiley-VCH, |c 2013. | ||
| 300 | |a xx, 303 p. : |b ill. | ||
| 490 | 1 | |a Advanced micro & nanosystems | |
| 500 | |a First edition 2007. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems |x Reliability. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Tabata, Osamu. | |
| 700 | 1 | |a Tsuchiya, Toshiyuki. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 830 | 0 | |a Advanced micro & nanosystems. | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=481344 |z Click to View |