Handbook of silicon based MEMS materials and technologies / Veikko Lindroos ... [et al.].
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Superior document: | Micro & nano technologies |
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TeilnehmendeR: | |
Year of Publication: | 2010 |
Edition: | 1st ed. |
Language: | English |
Series: | Micro & nano technologies.
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Online Access: | |
Physical Description: | xxxii, 636 p. :; ill. |
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