Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies / Veikko Lindroos ... [et al.].

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Superior document:Micro & nano technologies
:
ProQuest (Firm)
TeilnehmendeR:
Lindroos, Veikko.
ProQuest (Firm)
Year of Publication:2010
Edition:1st ed.
Language:English
Series:Micro & nano technologies.
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Physical Description:xxxii, 636 p. :; ill.
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record_format marc
spelling Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].
1st ed.
Amsterdam ; Boston : William Andrew/Elsevier, 2010.
xxxii, 636 p. : ill.
Micro & nano technologies
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectromechanical systems.
Microelectromechanical systems Materials.
Silicon Electric properties.
Electronic books.
Lindroos, Veikko.
ProQuest (Firm)
Micro & nano technologies.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=534865 Click to View
language English
format Electronic
eBook
author2 Lindroos, Veikko.
ProQuest (Firm)
author_facet Lindroos, Veikko.
ProQuest (Firm)
ProQuest (Firm)
author2_variant v l vl
author2_role TeilnehmendeR
TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Lindroos, Veikko.
title Handbook of silicon based MEMS materials and technologies
spellingShingle Handbook of silicon based MEMS materials and technologies
Micro & nano technologies
title_full Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].
title_fullStr Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].
title_full_unstemmed Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].
title_auth Handbook of silicon based MEMS materials and technologies
title_new Handbook of silicon based MEMS materials and technologies
title_sort handbook of silicon based mems materials and technologies
series Micro & nano technologies
series2 Micro & nano technologies
publisher William Andrew/Elsevier,
publishDate 2010
physical xxxii, 636 p. : ill.
edition 1st ed.
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7875
callnumber-sort TK 47875 H36 42010
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=534865
illustrated Illustrated
oclc_num 667288128
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is_hierarchy_title Handbook of silicon based MEMS materials and technologies
container_title Micro & nano technologies
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