Handbook of silicon based MEMS materials and technologies / Veikko Lindroos ... [et al.].
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| Superior document: | Micro & nano technologies |
|---|---|
| : | |
| TeilnehmendeR: | |
| Year of Publication: | 2010 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Micro & nano technologies.
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| Online Access: | |
| Physical Description: | xxxii, 636 p. :; ill. |
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| 245 | 0 | 0 | |a Handbook of silicon based MEMS materials and technologies |h [electronic resource] / |c Veikko Lindroos ... [et al.]. |
| 250 | |a 1st ed. | ||
| 260 | |a Amsterdam ; |a Boston : |b William Andrew/Elsevier, |c 2010. | ||
| 300 | |a xxxii, 636 p. : |b ill. | ||
| 490 | 1 | |a Micro & nano technologies | |
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Microelectromechanical systems |x Materials. | |
| 650 | 0 | |a Silicon |x Electric properties. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Lindroos, Veikko. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 830 | 0 | |a Micro & nano technologies. | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=534865 |z Click to View |