An introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.
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| Superior document: | Artech House microelectromechanical systems (MEMS) series |
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| Year of Publication: | 2004 |
| Edition: | 2nd ed. |
| Language: | English |
| Series: | Microelectromechanical systems series.
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| Online Access: | |
| Physical Description: | xx, 282 p. :; ill. |
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