An introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.
Saved in:
| Superior document: | Artech House microelectromechanical systems (MEMS) series |
|---|---|
| : | |
| TeilnehmendeR: | |
| Year of Publication: | 2004 |
| Edition: | 2nd ed. |
| Language: | English |
| Series: | Microelectromechanical systems series.
|
| Online Access: | |
| Physical Description: | xx, 282 p. :; ill. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| LEADER | 01443nam a2200397Ia 4500 | ||
|---|---|---|---|
| 001 | 500227665 | ||
| 003 | MiAaPQ | ||
| 005 | 20200520144314.0 | ||
| 006 | m o d | | ||
| 007 | cr cn||||||||| | ||
| 008 | 040514s2004 maua sb 001 0 eng d | ||
| 010 | |z 2004050669 | ||
| 020 | |z 1580535917 | ||
| 020 | |z 1580535909 (alk. paper) | ||
| 035 | |a (MiAaPQ)500227665 | ||
| 035 | |a (Au-PeEL)EBL227665 | ||
| 035 | |a (CaPaEBR)ebr10081925 | ||
| 035 | |a (OCoLC)56123929 | ||
| 040 | |a MiAaPQ |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a TK7875 |b .M35 2004 | |
| 082 | 0 | 4 | |a 621.381 |2 22 |
| 100 | 1 | |a Maluf, Nadim. | |
| 245 | 1 | 3 | |a An introduction to microelectromechanical systems engineering |h [electronic resource] / |c Nadim Maluf, Kirt Williams. |
| 250 | |a 2nd ed. | ||
| 260 | |a Boston : |b Artech House, |c 2004. | ||
| 300 | |a xx, 282 p. : |b ill. | ||
| 490 | 1 | |a Artech House microelectromechanical systems (MEMS) series | |
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Microtechnology. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Williams, Kirt. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 830 | 0 | |a Microelectromechanical systems series. | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=227665 |z Click to View |