Microelectromechanical systems : advanced materials and fabrication methods / / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
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| TeilnehmendeR: | |
| Year of Publication: | 1997 |
| Language: | English |
| Online Access: | |
| Physical Description: | xiv, 61 p. :; ill. |
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| Bibliography: | Includes bibliographical references (p. 51-55). |
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| ISBN: | 0585002509 (electronic bk.) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |