Microelectromechanical systems : advanced materials and fabrication methods / / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
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| TeilnehmendeR: | |
| Year of Publication: | 1997 |
| Language: | English |
| Online Access: | |
| Physical Description: | xiv, 61 p. :; ill. |
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| 050 | 4 | |a TK7874 |b .N333 1997 | |
| 082 | 0 | 4 | |a 621.381 |2 21 |
| 110 | 2 | |a National Research Council (U.S.). |b Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. | |
| 245 | 1 | 0 | |a Microelectromechanical systems |h [electronic resource] : |b advanced materials and fabrication methods / |c Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
| 260 | |a Washington, DC : |b National Academy Press, |c 1997. | ||
| 300 | |a xiv, 61 p. : |b ill. | ||
| 504 | |a Includes bibliographical references (p. 51-55). | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Microelectromechanical systems |x Design and construction. | |
| 655 | 4 | |a Electronic books. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3376045 |z Click to View |