Fundamentals of microfabrication and nanotechnology. : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / / Volume III : / Marc J. Madou.
Saved in:
| VerfasserIn: | |
|---|---|
| Place / Publishing House: | Boca Raton, Florida ;, London, [England] ;, New York : : CRC Press,, 2011. 2011 |
| Year of Publication: | 2011 |
| Edition: | Third edition. |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (642 pages) :; illustrations (some color), tables |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|