Fundamentals of microfabrication and nanotechnology. : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / / Volume III : / Marc J. Madou.
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| Place / Publishing House: | Boca Raton, Florida ;, London, [England] ;, New York : : CRC Press,, 2011. 2011 |
| Year of Publication: | 2011 |
| Edition: | Third edition. |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (642 pages) :; illustrations (some color), tables |
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| 082 | 0 | |a 620.5 |2 23 | |
| 100 | 1 | |a Madou, Marc J., |e author. | |
| 245 | 1 | 0 | |a Fundamentals of microfabrication and nanotechnology. |n Volume III : |b from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / |c Marc J. Madou. |
| 250 | |a Third edition. | ||
| 264 | 1 | |a Boca Raton, Florida ; |a London, [England] ; |a New York : |b CRC Press, |c 2011. | |
| 264 | 4 | |c 2011 | |
| 300 | |a 1 online resource (642 pages) : |b illustrations (some color), tables | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 504 | |a Includes bibliographical references at the end of each chapters. | ||
| 588 | |a Description based on print version record. | ||
| 590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Nanoelectromechanical systems. | |
| 650 | 0 | |a Microfluidics. | |
| 650 | 0 | |a Solid state physics. | |
| 655 | 4 | |a Electronic books. | |
| 776 | 0 | 8 | |i Print version: |a Madou, Marc J. |t Fundamentals of microfabrication and nanotechnology. Volume III. |b Third edition. |d Boca Raton, Florida ; London, [England] ; New York : CRC Press, c2011 |h xiii, 626 pages |z 9781420055160 |w 2011014406 |
| 797 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1446478 |z Click to View |