Metal impurities in silicon-device fabrication / / Klaus Graff.
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Superior document: | Springer Series in Materials Science ; 24 |
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VerfasserIn: | |
Place / Publishing House: | Berlin, [Germany] ;, Heidelberg, [Germany] : : Springer,, 1995. 1995 |
Year of Publication: | 1995 |
Language: | English |
Series: | Springer series in materials science ;
24. |
Online Access: | |
Physical Description: | 1 online resource (227 pages) :; illustrations. |
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