Wafer Fabrication : : Automatic Material Handling System / / Jie Zhang.

• Superior document: Title is part of eBook package: De Gruyter DG Plus eBook-Package 2018
• VerfasserIn: Zhang, Jie,
• TeilnehmendeR: Huazhong University of Science and Technology,.
• Place / Publishing House: Berlin ;, Boston : : De Gruyter, , [2018]; ©2018
• Year of Publication: 2018
• Language: English
• Physical Description: 1 online resource (XII, 272 p.)
• Other title: Frontmatter --; Preface --; Contents --; 1 Semiconductor wafer fabrication system --; 2 Automated material handling systems in SWFSs --; 3 Modeling methods of automated material handling systems in SWFSs --; 4 Analysis of automated material handling systems in SWFSs --; 5 Scheduling methods of automated material handling systems in SWFSs --; 6 Scheduling in Interbay automated material handling systems --; 7 Scheduling in Intrabay automatic material handling systems --; 8 Integrated scheduling in AMHSs --; 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs --; Index
• Format: Mode of access: Internet via World Wide Web.
• ISBN: 9783110487473; 9783110719550; 9783110604252; 9783110603255; 9783110604023; 9783110603118
• DOI: 10.1515/9783110487473
• Access: restricted access
• Hierarchical level: Monograph
• Statement of Responsibility: Jie Zhang.

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.