Wafer Fabrication : : Automatic Material Handling System / / Jie Zhang.
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...
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Superior document: | Title is part of eBook package: De Gruyter DG Plus eBook-Package 2018 |
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Place / Publishing House: | Berlin ;, Boston : : De Gruyter, , [2018] ©2018 |
Year of Publication: | 2018 |
Language: | English |
Online Access: | |
Physical Description: | 1 online resource (XII, 272 p.) |
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100 | 1 | |a Zhang, Jie, |e author. |4 aut |4 http://id.loc.gov/vocabulary/relators/aut | |
245 | 1 | 0 | |a Wafer Fabrication : |b Automatic Material Handling System / |c Jie Zhang. |
264 | 1 | |a Berlin ; |a Boston : |b De Gruyter, |c [2018] | |
264 | 4 | |c ©2018 | |
300 | |a 1 online resource (XII, 272 p.) | ||
336 | |a text |b txt |2 rdacontent | ||
337 | |a computer |b c |2 rdamedia | ||
338 | |a online resource |b cr |2 rdacarrier | ||
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505 | 0 | 0 | |t Frontmatter -- |t Preface -- |t Contents -- |t 1 Semiconductor wafer fabrication system -- |t 2 Automated material handling systems in SWFSs -- |t 3 Modeling methods of automated material handling systems in SWFSs -- |t 4 Analysis of automated material handling systems in SWFSs -- |t 5 Scheduling methods of automated material handling systems in SWFSs -- |t 6 Scheduling in Interbay automated material handling systems -- |t 7 Scheduling in Intrabay automatic material handling systems -- |t 8 Integrated scheduling in AMHSs -- |t 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- |t Index |
506 | 0 | |a restricted access |u http://purl.org/coar/access_right/c_16ec |f online access with authorization |2 star | |
520 | |a This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. | ||
538 | |a Mode of access: Internet via World Wide Web. | ||
546 | |a In English. | ||
588 | 0 | |a Description based on online resource; title from PDF title page (publisher's Web site, viewed 30. Aug 2021) | |
650 | 0 | |a Manufacturing processes |x Automatic control. | |
650 | 0 | |a Semiconductor wafers |x Automatic control. | |
650 | 7 | |a Technology & Engineering / Manufacturing. |2 bisacsh | |
700 | 1 | |a Huazhong University of Science and Technology,. | |
773 | 0 | 8 | |i Title is part of eBook package: |d De Gruyter |t DG Plus eBook-Package 2018 |z 9783110719550 |
773 | 0 | 8 | |i Title is part of eBook package: |d De Gruyter |t EBOOK PACKAGE COMPLETE 2018 English |z 9783110604252 |
773 | 0 | 8 | |i Title is part of eBook package: |d De Gruyter |t EBOOK PACKAGE COMPLETE 2018 |z 9783110603255 |o ZDB-23-DGG |
773 | 0 | 8 | |i Title is part of eBook package: |d De Gruyter |t EBOOK PACKAGE Engineering, Computer Sciences 2018 English |z 9783110604023 |
773 | 0 | 8 | |i Title is part of eBook package: |d De Gruyter |t EBOOK PACKAGE Engineering, Computer Sciences 2018 |z 9783110603118 |o ZDB-23-DEI |
776 | 0 | |c EPUB |z 9783110487237 | |
776 | 0 | |c print |z 9783110486902 | |
856 | 4 | 0 | |u https://doi.org/10.1515/9783110487473 |
856 | 4 | 0 | |u https://www.degruyter.com/isbn/9783110487473 |
856 | 4 | 2 | |3 Cover |u https://www.degruyter.com/cover/covers/9783110487473.jpg |
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