Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
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| Superior document: | Nanotechnology science and technology |
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| Year of Publication: | 2010 |
| Language: | English |
| Series: | Nanotechnology science and technology series.
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| Online Access: | |
| Physical Description: | 67 p. :; ill. |
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| Bibliography: | Includes bibliographical references (p. [51]-61) and index. |
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| ISBN: | 9781616687496 (softcover) 9781617283185 (electronic bk.) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo. |