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Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.

Participants: Ree, Moonhor. [ ]; ProQuest (Firm) [ ]; Yoon, Jinhwan. [ TeilnehmendeR ]; Heo, Kyuyoung. [ TeilnehmendeR ]; ProQuest (Firm) [ TeilnehmendeR ]
Published: c2010.
Superior document: Nanotechnology science and technology

Other Authors: “...Heo, Kyuyoung....”

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