Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
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| Superior document: | Nanotechnology science and technology |
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| TeilnehmendeR: | |
| Year of Publication: | 2010 |
| Language: | English |
| Series: | Nanotechnology science and technology series.
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| Online Access: | |
| Physical Description: | 67 p. :; ill. |
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| LEADER | 01643nam a2200421 a 4500 | ||
|---|---|---|---|
| 001 | 5003019998 | ||
| 003 | MiAaPQ | ||
| 005 | 20200520144314.0 | ||
| 006 | m o d | | ||
| 007 | cr cn||||||||| | ||
| 008 | 100506s2010 nyuad sb 001 0 eng d | ||
| 010 | |z 2010016713 | ||
| 020 | |z 9781616687496 (softcover) | ||
| 020 | |a 9781617283185 (electronic bk.) | ||
| 035 | |a (MiAaPQ)5003019998 | ||
| 035 | |a (Au-PeEL)EBL3019998 | ||
| 035 | |a (CaPaEBR)ebr10675006 | ||
| 035 | |a (OCoLC)923662443 | ||
| 040 | |a MiAaPQ |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a TK7871.15.F5 |b R44 2010 | |
| 082 | 0 | 4 | |a 621.381 |2 22 |
| 100 | 1 | |a Ree, Moonhor. | |
| 245 | 1 | 0 | |a Low-k nanoporous interdielectrics |h [electronic resource] : |b materials, thin film fabrications, structures and properties / |c Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo. |
| 260 | |a Hauppauge, N.Y. : |b Nova Science Publishers, |c c2010. | ||
| 300 | |a 67 p. : |b ill. | ||
| 490 | 1 | |a Nanotechnology science and technology | |
| 504 | |a Includes bibliographical references (p. [51]-61) and index. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Dielectric films. | |
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Porous materials. | |
| 650 | 0 | |a Interconnects (Integrated circuit technology) | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Yoon, Jinhwan. | |
| 700 | 1 | |a Heo, Kyuyoung. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 830 | 0 | |a Nanotechnology science and technology series. | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3019998 |z Click to View |