Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
Saved in:
| Superior document: | Nanotechnology science and technology |
|---|---|
| : | |
| TeilnehmendeR: | |
| Year of Publication: | 2010 |
| Language: | English |
| Series: | Nanotechnology science and technology series.
|
| Online Access: | |
| Physical Description: | 67 p. :; ill. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|