Sputtering materials for VLSI and thin film devices / / by Jaydeep Sarkar.
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| Place / Publishing House: | Oxford ;, Boston : : William Andrew Publishing,, 2014. |
| Year of Publication: | 2014 |
| Edition: | First edition. |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (614 pages) :; illustrations |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9780815515937 (hbk.) 9780815519874 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | by Jaydeep Sarkar. |