Sputtering materials for VLSI and thin film devices /

Sputtering materials for VLSI and thin film devices / / by Jaydeep Sarkar.

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Sarkar, Jaydeep.
Place / Publishing House:Oxford ;, Boston : : William Andrew Publishing,, 2014.
Year of Publication:2014
Edition:First edition.
Language:English
Online Access:
Physical Description:1 online resource (614 pages) :; illustrations
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id 5001550523
ctrlnum (MiAaPQ)5001550523
(Au-PeEL)EBL1550523
(CaPaEBR)ebr10800153
(CaONFJC)MIL543246
(OCoLC)863203964
collection bib_alma
record_format marc
spelling Sarkar, Jaydeep.
Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar.
First edition.
Oxford ; Boston : William Andrew Publishing, 2014.
1 online resource (614 pages) : illustrations
text rdacontent
computer rdamedia
online resource rdacarrier
Includes bibliographical references and index.
Description based on print version record.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microelectronics Materials.
Flat panel displays Materials.
Sputtering (Physics)
Electronic books.
Print version: Sarkar, Jaydeep. Sputtering materials for VLSI and thin film devices. Oxford : William Andrew Publishing, 2014 x, 603 pages : illustrations ; 24 cm. 9780815515937
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1550523 Click to View
language English
format eBook
author Sarkar, Jaydeep.
spellingShingle Sarkar, Jaydeep.
Sputtering materials for VLSI and thin film devices /
author_facet Sarkar, Jaydeep.
author_variant j s js
author_sort Sarkar, Jaydeep.
title Sputtering materials for VLSI and thin film devices /
title_full Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar.
title_fullStr Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar.
title_full_unstemmed Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar.
title_auth Sputtering materials for VLSI and thin film devices /
title_new Sputtering materials for VLSI and thin film devices /
title_sort sputtering materials for vlsi and thin film devices /
publisher William Andrew Publishing,
publishDate 2014
physical 1 online resource (614 pages) : illustrations
edition First edition.
isbn 9780815519874
9780815515937
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7871
callnumber-sort TK 47871 S37 42012
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1550523
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.381
dewey-sort 3621.381
dewey-raw 621.381
dewey-search 621.381
oclc_num 863203964
work_keys_str_mv AT sarkarjaydeep sputteringmaterialsforvlsiandthinfilmdevices
status_str n
ids_txt_mv (MiAaPQ)5001550523
(Au-PeEL)EBL1550523
(CaPaEBR)ebr10800153
(CaONFJC)MIL543246
(OCoLC)863203964
is_hierarchy_title Sputtering materials for VLSI and thin film devices /
_version_ 1792330763487674368
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01763nam a22004331i 4500</leader><controlfield tag="001">5001550523</controlfield><controlfield tag="003">MiAaPQ</controlfield><controlfield tag="005">20200520144314.0</controlfield><controlfield tag="006">m o d | </controlfield><controlfield tag="007">cr cnu||||||||</controlfield><controlfield tag="008">131209s2014 enka ob 001 0 eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">9780815515937 (hbk.)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815519874</subfield><subfield code="q">(electronic bk.)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiAaPQ)5001550523</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(Au-PeEL)EBL1550523</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaPaEBR)ebr10800153</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaONFJC)MIL543246</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)863203964</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">MiAaPQ</subfield><subfield code="b">eng</subfield><subfield code="e">rda</subfield><subfield code="e">pn</subfield><subfield code="c">MiAaPQ</subfield><subfield code="d">MiAaPQ</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TK7871</subfield><subfield code="b">.S37 2012</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">22</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Sarkar, Jaydeep.</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Sputtering materials for VLSI and thin film devices /</subfield><subfield code="c">by Jaydeep Sarkar.</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">First edition.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford ;</subfield><subfield code="a">Boston :</subfield><subfield code="b">William Andrew Publishing,</subfield><subfield code="c">2014.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (614 pages) :</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="504" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index.</subfield></datafield><datafield tag="588" ind1=" " ind2=" "><subfield code="a">Description based on print version record.</subfield></datafield><datafield tag="590" ind1=" " ind2=" "><subfield code="a">Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Microelectronics</subfield><subfield code="x">Materials.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Flat panel displays</subfield><subfield code="x">Materials.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Sputtering (Physics)</subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books.</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Print version:</subfield><subfield code="a">Sarkar, Jaydeep.</subfield><subfield code="t">Sputtering materials for VLSI and thin film devices.</subfield><subfield code="d">Oxford : William Andrew Publishing, 2014</subfield><subfield code="h">x, 603 pages : illustrations ; 24 cm.</subfield><subfield code="z">9780815515937</subfield></datafield><datafield tag="797" ind1="2" ind2=" "><subfield code="a">ProQuest (Firm)</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1550523</subfield><subfield code="z">Click to View</subfield></datafield></record></collection>

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