Sputtering materials for VLSI and thin film devices / / by Jaydeep Sarkar.
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| Place / Publishing House: | Oxford ;, Boston : : William Andrew Publishing,, 2014. |
| Year of Publication: | 2014 |
| Edition: | First edition. |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (614 pages) :; illustrations |
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| 003 | MiAaPQ | ||
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| 006 | m o d | | ||
| 007 | cr cnu|||||||| | ||
| 008 | 131209s2014 enka ob 001 0 eng d | ||
| 020 | |z 9780815515937 (hbk.) | ||
| 020 | |a 9780815519874 |q (electronic bk.) | ||
| 035 | |a (MiAaPQ)5001550523 | ||
| 035 | |a (Au-PeEL)EBL1550523 | ||
| 035 | |a (CaPaEBR)ebr10800153 | ||
| 035 | |a (CaONFJC)MIL543246 | ||
| 035 | |a (OCoLC)863203964 | ||
| 040 | |a MiAaPQ |b eng |e rda |e pn |c MiAaPQ |d MiAaPQ | ||
| 050 | 4 | |a TK7871 |b .S37 2012 | |
| 082 | 0 | |a 621.381 |2 22 | |
| 100 | 1 | |a Sarkar, Jaydeep. | |
| 245 | 1 | 0 | |a Sputtering materials for VLSI and thin film devices / |c by Jaydeep Sarkar. |
| 250 | |a First edition. | ||
| 264 | 1 | |a Oxford ; |a Boston : |b William Andrew Publishing, |c 2014. | |
| 300 | |a 1 online resource (614 pages) : |b illustrations | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 588 | |a Description based on print version record. | ||
| 590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Flat panel displays |x Materials. | |
| 650 | 0 | |a Sputtering (Physics) | |
| 655 | 4 | |a Electronic books. | |
| 776 | 0 | 8 | |i Print version: |a Sarkar, Jaydeep. |t Sputtering materials for VLSI and thin film devices. |d Oxford : William Andrew Publishing, 2014 |h x, 603 pages : illustrations ; 24 cm. |z 9780815515937 |
| 797 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1550523 |z Click to View |