Metal impurities in silicon-device fabrication / / Klaus Graff.
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| Superior document: | Springer Series in Materials Science ; 24 |
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| VerfasserIn: | |
| Place / Publishing House: | Berlin, [Germany] ;, Heidelberg, [Germany] : : Springer,, 1995. 1995 |
| Year of Publication: | 1995 |
| Language: | English |
| Series: | Springer series in materials science ;
24. |
| Online Access: | |
| Physical Description: | 1 online resource (227 pages) :; illustrations. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9783642975950 9783642975936 (ebook) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Klaus Graff. |