Metal impurities in silicon-device fabrication / / Klaus Graff.
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Superior document: | Springer Series in Materials Science ; 24 |
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VerfasserIn: | |
Place / Publishing House: | Berlin, [Germany] ;, Heidelberg, [Germany] : : Springer,, 1995. 1995 |
Year of Publication: | 1995 |
Language: | English |
Series: | Springer series in materials science ;
24. |
Online Access: | |
Physical Description: | 1 online resource (227 pages) :; illustrations. |
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LEADER | 01871nam a2200445 i 4500 | ||
---|---|---|---|
001 | 5003098640 | ||
003 | MiAaPQ | ||
005 | 20200520144314.0 | ||
006 | m o d | | ||
007 | cr cnu|||||||| | ||
008 | 170417t19951995gw a ob 001 0 eng d | ||
020 | |z 9783642975950 | ||
020 | |a 9783642975936 (e-book) | ||
035 | |a (MiAaPQ)5003098640 | ||
035 | |a (Au-PeEL)EBL3098640 | ||
035 | |a (CaPaEBR)ebr10973517 | ||
035 | |a (OCoLC)936317229 | ||
040 | |a MiAaPQ |b eng |e rda |e pn |c MiAaPQ |d MiAaPQ | ||
050 | 4 | |a TK7871.85 |b .G66 1995 | |
082 | 0 | |a 621.3815/2 |2 20 | |
100 | 1 | |a Graff, Klaus, |d 1931- |e author. | |
245 | 1 | 0 | |a Metal impurities in silicon-device fabrication / |c Klaus Graff. |
264 | 1 | |a Berlin, [Germany] ; |a Heidelberg, [Germany] : |b Springer, |c 1995. | |
264 | 4 | |c 1995 | |
300 | |a 1 online resource (227 pages) : |b illustrations. | ||
336 | |a text |2 rdacontent | ||
337 | |a computer |2 rdamedia | ||
338 | |a online resource |2 rdacarrier | ||
490 | 1 | |a Springer Series in Materials Science ; |v 24 | |
504 | |a Includes bibliographical references and index. | ||
588 | |a Description based on print version record. | ||
590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
650 | 0 | |a Semiconductors |x Defects. | |
650 | 0 | |a Silicon |x Inclusions. | |
650 | 0 | |a Silicon |x Defects. | |
655 | 4 | |a Electronic books. | |
776 | 0 | 8 | |i Print version: |a Graff, Klaus, 1931- |t Metal impurities in silicon-device fabrication. |d Berlin, [Germany] ; Heidelberg, [Germany] : Springer, c1995 |h ix, 216 pages |k Springer series in materials science ; 24. |z 9783642975950 |w 94024599 |
797 | 2 | |a ProQuest (Firm) | |
830 | 0 | |a Springer series in materials science ; |v 24. | |
856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3098640 |z Click to View |