Metal impurities in silicon-device fabrication /

Metal impurities in silicon-device fabrication / / Klaus Graff.

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Bibliographic Details
Superior document:Springer Series in Materials Science ; 24
VerfasserIn:
Graff, Klaus, 1931-
Place / Publishing House:Berlin, [Germany] ;, Heidelberg, [Germany] : : Springer,, 1995.
1995
Year of Publication:1995
Language:English
Series:Springer series in materials science ; 24.
Online Access:
Physical Description:1 online resource (227 pages) :; illustrations.
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id 5003098640
ctrlnum (MiAaPQ)5003098640
(Au-PeEL)EBL3098640
(CaPaEBR)ebr10973517
(OCoLC)936317229
collection bib_alma
record_format marc
spelling Graff, Klaus, 1931- author.
Metal impurities in silicon-device fabrication / Klaus Graff.
Berlin, [Germany] ; Heidelberg, [Germany] : Springer, 1995.
1995
1 online resource (227 pages) : illustrations.
text rdacontent
computer rdamedia
online resource rdacarrier
Springer Series in Materials Science ; 24
Includes bibliographical references and index.
Description based on print version record.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Semiconductors Defects.
Silicon Inclusions.
Silicon Defects.
Electronic books.
Print version: Graff, Klaus, 1931- Metal impurities in silicon-device fabrication. Berlin, [Germany] ; Heidelberg, [Germany] : Springer, c1995 ix, 216 pages Springer series in materials science ; 24. 9783642975950 94024599
ProQuest (Firm)
Springer series in materials science ; 24.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3098640 Click to View
language English
format eBook
author Graff, Klaus, 1931-
spellingShingle Graff, Klaus, 1931-
Metal impurities in silicon-device fabrication /
Springer Series in Materials Science ;
author_facet Graff, Klaus, 1931-
author_variant k g kg
author_role VerfasserIn
author_sort Graff, Klaus, 1931-
title Metal impurities in silicon-device fabrication /
title_full Metal impurities in silicon-device fabrication / Klaus Graff.
title_fullStr Metal impurities in silicon-device fabrication / Klaus Graff.
title_full_unstemmed Metal impurities in silicon-device fabrication / Klaus Graff.
title_auth Metal impurities in silicon-device fabrication /
title_new Metal impurities in silicon-device fabrication /
title_sort metal impurities in silicon-device fabrication /
series Springer Series in Materials Science ;
series2 Springer Series in Materials Science ;
publisher Springer,
publishDate 1995
physical 1 online resource (227 pages) : illustrations.
isbn 9783642975936 (e-book)
9783642975950
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7871
callnumber-sort TK 47871.85 G66 41995
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3098640
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.3815/2
dewey-sort 3621.3815 12
dewey-raw 621.3815/2
dewey-search 621.3815/2
oclc_num 936317229
work_keys_str_mv AT graffklaus metalimpuritiesinsilicondevicefabrication
status_str n
ids_txt_mv (MiAaPQ)5003098640
(Au-PeEL)EBL3098640
(CaPaEBR)ebr10973517
(OCoLC)936317229
hierarchy_parent_title Springer Series in Materials Science ; 24
hierarchy_sequence 24.
is_hierarchy_title Metal impurities in silicon-device fabrication /
container_title Springer Series in Materials Science ; 24
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